OHT

The ALPXOS OHT is a specialized material handling system designed to provide seamless transportation throughout semiconductor manufacturing processes in cleanroom environments.

Key Features

• Efficiently transports 200 mm and 300 mm wafer carriers between intrabay systems and stocker locations.
• Zero-footprint overhead design, maximizing valuable cleanroom floor space.
• Compatible with multiple carrier types, including FOUP, SMIF, HA200, cassette, and other custom wafer carriers.

Features

• Highly efficient Overhead Hoist Transport (OHT) system designed for semiconductor and cleanroom environments
• CE certified for MD, LVD, and EMC, ensuring compliance with international safety and performance standards
• Low-profile design suitable for facilities with limited ceiling height, including older buildings
• Long-reach Y-axis enabling access to up to four rows of SMIF or HA200 overhead storage shelves
• Wireless Power Transmission (WPT) allowing virtually unlimited travel distance without traditional power constraints
• Wi-Fi communication with local controllers for seamless system integration and control
• Equipped with LiDAR sensors for enhanced safety, precise detection, and navigation
• Customizable system design to accommodate various carrier types and production requirements